In February, ASML unveiled its new ‘High NA EUV’ machine. Just before EUV machines, chip-makers relied on deep UV light (193 nm wavelength) to project intricate patterns onto the wafers. How is EUV light produced? At this juncture, the gas emits EUV light that the machine collects for use. This entire process – from the gun to the emission – happens 50,000-times per second to produce EUV light of sufficient intensity.

Source: The Hindu March 07, 2024 07:51 UTC